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  3. Vol. E91-C, No. 10 October 2008 /
  4. Papers

Estimation of Optimum Ion Energy for the Reduction of Resistivity in Bias Sputtering of ITO Thin Films

Authors

  • Kiyoshi ISHII
  • Yoshifumi SAITOU
  • Kengo FURUTANI
  • Hiroshi SAKUMA
  • Yoshito IKEDA

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Published

2008-10-01

Issue

Vol. E91-C, No. 10 October 2008

Section

Papers

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