Evaluation of Dielectric Reliability of Ultrathin HfSiO<SUB>x</SUB>N<SUB>y</SUB> in Metal-Gate Capacitors

Authors

• Yanli PEI
• Hideki MURAKAMI
• Seiichiro HIGASHI
• Seiichi MIYAZAKI
• Seiji INUMIYA
• Yasuo NARA