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  3. Vol. E90-C, No. 5 May 2007 /
  4. Papers

Physical Origin of Stress-Induced Leakage Currents in Ultra-Thin Silicon Dioxide Films

Authors

  • Tetsuo ENDOH
  • Kazuyuki HIROSE
  • Kenji SHIRAISHI

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Published

2007-05-01

Issue

Vol. E90-C, No. 5 May 2007

Section

Papers

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